真空传感器 [真空] vacuum transducer
[真空] vacuum sensor
- 文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor. - 设计了一种工作在恒电压模式的、微热板结构的单片集成电阻真空传感器芯片。
In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed. - 该密封检漏系统采用抽真空的方法对被测工件进行测试,通过真空压力传感器将测试数据传送至计算机测量显示系统;
The new system tests the workpiece through the method of vacuum, that is, the test data will be sent to the computer display system through vacuum pressure sensor.