直流溅射 [电子] direct current sputtering
- 介绍一种大功率直流溅射恒流电源的设计。
The design of a DC sputtering power source was presented. - 用原子力显微镜(AFM)对直流溅射和射频溅射制备铝膜的表面粗糙度及颗粒大小进行了分析比较。
The roughness and granularity of Al film prepared by DC and RF magnetron sputtering arc analyzed using AFM. - 利用直流溅射方法在液体基底(硅油)表面成功制备出金属铁薄膜系统,研究了其生长机理及特征的表面有序结构。
It is found that the growth mechanism of the iron films is similar to that of nonmagnetic films on liquid substrates, in accordance with a two-stage growth model.