外延生长过程 epitaxial growth process
- 本文对薄膜沉积的形核、生长过程,对同质外延、异质外延生长过程中的某些现象进行了研究。
Some of the processes involved in thin film nucleation and growth are discussed. Somephenomena presented in homogeneous and heteroepitaxy growth are also investigated. - 再略为详细地讨论液相外延生长过程,因为晶体生长是实现集成光路使用的必不可少的一个环节。
The growth processes of liquid-phase epitaxy will be discussed in some detail, as crystal growth is a necessary step for the realization of integrated optics using.
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